Aiming at even finer-line patterns, an even more minute beam spot diameter has been achieved through repeated unique improvements to the patterning engine optical system.
Research and development is continuing for a change from the current L/S=8μm to L/S=5μm. Furthermore, a scan speed 1.4 times that of conventional models has been achieved, resulting in substantial improvements in productivity while also enabling a pattern positioning precision of |AVE|＋3σ＜7μm.

The DE-6UH ⅡE responds flexibly to a variety of scale formulas. Cycle time has been improved through real-time compensation for multi-partition areas and the inclusion of a high precision drive axis for alignment cameras, while more effective per-sheet operation times have lead to dramatic improvements in productivity.
Furthermore, a wealth of performance-improving functions are available with visible job creation and automatic condition generation included in the JOB Viewer, and a line controller offering overall product management online.

In the pursuit of easier maintenance, the DE-6UH ⅡE has laser output monitoring and correction functions, as well as automatic optical axis monitoring functionality.
The main unit has also been made smaller, allowing for a smooth exchange from the contact exposure machine.